Products

Desktop Dip Coater with variable Speed (1-200 mm/min) – PTL-MM01
July 15, 2016
Compact Spin Coater (500-8000 rpm, 4“ wafer Max.) with 3 Sets of Vacuum Chucks & Complete Accessories – VTC-100A
July 15, 2016
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Programmable Spin Coater ( 10K rpm & 5″ max) with PP Chamber & Vacuum Chucks and Optional Heating Cover – VTC-100PA

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Description

VTC-100PA is CE certified tabletop spin coating device dedicated to spin coat small substrates up to 100 mm diameter at Max. 10000 rpm. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible.

Specifications
Main Features • 500 ~ 10000 RPM spinning speed programmable
• Accept substrate from 5 mm to 5″
• PP chamber for anti-corrosive operation.
• One gas inlet port on top of cover which can fill inert gas during coating
• One 20ml Plastic Syringe is included
• Suitable using Ar gas ( vacuum pump must be outside glovebox)
• Safety interlock is integrated into the lid
Vacuum Chuck & Vacuum pump • Chamber size: 150 mm diameter
• 2 sets of PP anti-corrosive vacuum chucks with different sizes (Φ44mm, Φ9mm), which can hold substrate from 5 mm to 5″ Dia. ( see pic below )
• Click the picture below right to watch demo video for how to use 9mm vacuum chuck hold 5mm sample.
• One 120L/min Oilless Vacuum Pump is included in the standard package, please click the picture below for specification details.
Programmable Control • Duration up to 60 seconds
• Acceleration: 100 – 2000 rpm / sec adjustable
• Accuracy: < 5%
• Digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click picture below-right to see typical program setting)
Input Power • AC 220V (You may order a transformer to operate at 110V)
• 1000 W total for oilless pump and spin cater
Gas Inlet 6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under variable gas flow environment.
Warranty & Compliance • One year limited with lifetime support
• Rusting and damage due to improper storage condition or maintenance are not covered by warranty
• CE certified
Warnings • Do not overflush the water bowl/base with any kinds of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use fabric cloth to wipe out the residues remain in the bow/base.
• If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
• For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.
Shipping Dimensions 40″(L) x 30″(W) x 30″(H)